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Typical hydrogen-passivated silicon <100> surface showing
rows of silicon dimers, step edge near the top, and a moderate amount of contamination.
Thermal drift has caused distortion of the
structures, particularly on the step near the top of the image.
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Zyvex
Asia works with partner company Zyvex Labs in
developing the technology to do Atomically
Precise Manufacturing: building structures and products with atomic precision.
Our approach
to APM is described elsewhere,
but in brief, we start with a silicon chip, clean off surface contamination
down to the bare silicon atoms in
our UHV chamber, passivate it with hydrogen, perform atomic precision depassivation
lithography (popping off the hydrogen passivation atoms with a sharp STM
tip) to define structures, then grow 3D structures layer-by-layer by depositing
a gas that sticks to the depassivated areas.
Our work is done
in a custom-built UHV chamber, using a custom-built STM modeled on the Lyding design,
running custom software we developed.
Our lab is inside
the Institute for Materials Research
and Engineering, and we collaborate
closely with IMRE scientists in developing this technology. |